Materials and devices are the foundation and precursor of modern high-tech. Nanomaterialization and miniaturization of devices have placed new demands on the evaluation methods of various new materials and devices - micro-domain physical properties and non-uniformity detection, and internal Non-destructive observation of structures and defects.
However, existing scanning electron microscopy (SEM) and scanning acoustic microscopy (SAM) cannot meet these needs. Scanning Electroacoustic Microscopy (SEAM) combines the characteristics of SEM and SAM with this requirement, combined with the features of high-resolution rapid imaging of electron microscopy and the non-destructive acquisition of materials inside acoustic microscopy. The ability of information and simultaneous observation of secondary electron images and electroacoustic images based on different imaging mechanisms in situ.
With the support of the National Fund Committee of the Chinese Academy of Sciences and the National “863†Program, the scanning electroacoustic microscope and its related devices, materials, imaging theory and applied research have been pioneered in China and almost simultaneously with the international community. The development of SEAM-I, II and III electroacoustic imaging systems has continuously improved and improved the performance indicators and reached a practical level.
A typical scanning electron microscope is a constant energy electron beam that is always irradiated onto a sample for XY scanning, while electroacoustic imaging is performed with an intensity modulated and concentrated electron beam on the surface of the sample for XY scanning, which is electroacoustic imaging. The special working mode is also the basic condition for electroacoustic imaging.
In scanning electroacoustic imaging systems, we have adopted the following innovative technologies: the invention of variable rate scanning and adaptive processors, successfully combining electron microscopy and acoustic microscopy, as well as digital signal processing and high sensitivity sensing technology. A high-resolution practical scanning electroacoustic microscope with a series of independent intellectual property rights was established. A multi-parameter (electric field, temperature field, force field and frequency) controllable multi-functional composite structure electroacoustic signal sensor and its control device were established. A new method for comprehensively observing the dynamic behavior of electroacoustic images.
Invented the transverse mode multi-layer electroacoustic signal sensing component and used it for electro-acoustic imaging system for the first time; it is the first in the world to prepare high-performance, large-size lead magnesium niobate (0.67PMN-0.33PT) crystal material and as electroacoustic The signal sensitive component was first applied to the electroacoustic signal sensor; the first complete three-dimensional electroacoustic imaging theory was established, and the excitation mechanism of the electroacoustic signal, the mechanism of the electroacoustic image contrast and the theoretical basis of the display space high resolution were expounded. And electroacoustic imaging is the physical essence of near-field imaging.
Scanning electroacoustic imaging technology has been well received at home and abroad. This project has made a self-contained system in the development of electroacoustic imaging systems, design and manufacture of electroacoustic signal sensors, high-performance, sensitive material preparation for large-size sensors, the establishment of electroacoustic imaging theory, and the application of electroacoustic microscopy imaging technology. Comprehensive, systematic and complete independent intellectual property rights related to electroacoustic imaging technology.
The implementation of scanning electroacoustic imaging technology has facilitated the successful completion of national tasks. On the electro-acoustic microscope established by the applicant, the applicant carried out research on the surface and internal electroacoustic imaging of various materials and devices related to major fund projects and “973†projects, and achieved many innovative results.
New discoveries have been made in scientific research using electroacoustic microscopy. Scientists at home and abroad have used the electro-acoustic microscope we developed to obtain new discoveries in their respective fields of research. Dr. Kohler, a German scientist, first discovered the ferromagnetic domain structure and its corresponding mechanism explanation on martensite materials. Dr. Hang He and Professor Ruyan Guo of the University of Pennsylvania in the United States obtained electroacoustic images of composite domain morphology of iron-elastic domains and 180° anti-parallel periodic domains on different materials, and considered electroacoustic imaging technology to study the electromechanical coupling effect of functional materials. A unique approach.
Professor Li Shuzhen from Sun Yat-sen University used electroacoustic imaging technology to study the heterogeneous mismatch and mismatch stress release process of semiconductor materials, the anisotropy and isotropic growth of twins in epitaxial wafers, and the intrinsic defects of epitaxial wafers. The impact and other aspects have been successful. Professor Kojima of the University of Tsukuba in Japan obtained the electro-acoustic image of the butterfly-shaped BaTiO3 crystal domain for the first time. Dr. Peng Haidong of Tsinghua University observed the electroacoustic images of the surface and subsurface microstructure of metal-ceramic composite coatings.
At present, electroacoustic microscopes and technologies and related devices and materials have been exported to the United States, Germany, Japan, the Netherlands, Singapore and Taiwan and other countries and regions, and are known as "a successful example of China's large-scale instrument exports to developed countries and regions." . It also equipped a scanning electroacoustic microscope for Baosteel, one of the top universities, research institutes and one of the world's top 500 companies.
Scanning electroacoustic imaging technology has promoted the development of related microscopic imaging technology in China. Based on electroacoustic imaging technology, it is combined with the currently used atomic force microscope to establish low-frequency (<30kHz) high-resolution (~10nm) scanning probe acoustic microscopy imaging technology, which is The different technical features, functions and imaging mechanisms of probe microscopes based on tunnel microscopy (STM) and atomic force microscopy (AFM) are new developments in scanning electroacoustic microscopy, and their application prospects are very broad.
China's large-scale scientific instruments have always relied on imports. The electro-acoustic microscope independently developed by China has been exported to foreign countries and won honors for the country. Scanning electroacoustic microscopy developed independently in China and the scanning probe acoustic microscopy developed on the basis of this have enriched and developed microscopic imaging science and technology, providing for the study of material mesoscopic and microscopic features. A new means and promoted the development of related science and technology.
However, existing scanning electron microscopy (SEM) and scanning acoustic microscopy (SAM) cannot meet these needs. Scanning Electroacoustic Microscopy (SEAM) combines the characteristics of SEM and SAM with this requirement, combined with the features of high-resolution rapid imaging of electron microscopy and the non-destructive acquisition of materials inside acoustic microscopy. The ability of information and simultaneous observation of secondary electron images and electroacoustic images based on different imaging mechanisms in situ.
With the support of the National Fund Committee of the Chinese Academy of Sciences and the National “863†Program, the scanning electroacoustic microscope and its related devices, materials, imaging theory and applied research have been pioneered in China and almost simultaneously with the international community. The development of SEAM-I, II and III electroacoustic imaging systems has continuously improved and improved the performance indicators and reached a practical level.
A typical scanning electron microscope is a constant energy electron beam that is always irradiated onto a sample for XY scanning, while electroacoustic imaging is performed with an intensity modulated and concentrated electron beam on the surface of the sample for XY scanning, which is electroacoustic imaging. The special working mode is also the basic condition for electroacoustic imaging.
In scanning electroacoustic imaging systems, we have adopted the following innovative technologies: the invention of variable rate scanning and adaptive processors, successfully combining electron microscopy and acoustic microscopy, as well as digital signal processing and high sensitivity sensing technology. A high-resolution practical scanning electroacoustic microscope with a series of independent intellectual property rights was established. A multi-parameter (electric field, temperature field, force field and frequency) controllable multi-functional composite structure electroacoustic signal sensor and its control device were established. A new method for comprehensively observing the dynamic behavior of electroacoustic images.
Invented the transverse mode multi-layer electroacoustic signal sensing component and used it for electro-acoustic imaging system for the first time; it is the first in the world to prepare high-performance, large-size lead magnesium niobate (0.67PMN-0.33PT) crystal material and as electroacoustic The signal sensitive component was first applied to the electroacoustic signal sensor; the first complete three-dimensional electroacoustic imaging theory was established, and the excitation mechanism of the electroacoustic signal, the mechanism of the electroacoustic image contrast and the theoretical basis of the display space high resolution were expounded. And electroacoustic imaging is the physical essence of near-field imaging.
Scanning electroacoustic imaging technology has been well received at home and abroad. This project has made a self-contained system in the development of electroacoustic imaging systems, design and manufacture of electroacoustic signal sensors, high-performance, sensitive material preparation for large-size sensors, the establishment of electroacoustic imaging theory, and the application of electroacoustic microscopy imaging technology. Comprehensive, systematic and complete independent intellectual property rights related to electroacoustic imaging technology.
The implementation of scanning electroacoustic imaging technology has facilitated the successful completion of national tasks. On the electro-acoustic microscope established by the applicant, the applicant carried out research on the surface and internal electroacoustic imaging of various materials and devices related to major fund projects and “973†projects, and achieved many innovative results.
New discoveries have been made in scientific research using electroacoustic microscopy. Scientists at home and abroad have used the electro-acoustic microscope we developed to obtain new discoveries in their respective fields of research. Dr. Kohler, a German scientist, first discovered the ferromagnetic domain structure and its corresponding mechanism explanation on martensite materials. Dr. Hang He and Professor Ruyan Guo of the University of Pennsylvania in the United States obtained electroacoustic images of composite domain morphology of iron-elastic domains and 180° anti-parallel periodic domains on different materials, and considered electroacoustic imaging technology to study the electromechanical coupling effect of functional materials. A unique approach.
Professor Li Shuzhen from Sun Yat-sen University used electroacoustic imaging technology to study the heterogeneous mismatch and mismatch stress release process of semiconductor materials, the anisotropy and isotropic growth of twins in epitaxial wafers, and the intrinsic defects of epitaxial wafers. The impact and other aspects have been successful. Professor Kojima of the University of Tsukuba in Japan obtained the electro-acoustic image of the butterfly-shaped BaTiO3 crystal domain for the first time. Dr. Peng Haidong of Tsinghua University observed the electroacoustic images of the surface and subsurface microstructure of metal-ceramic composite coatings.
At present, electroacoustic microscopes and technologies and related devices and materials have been exported to the United States, Germany, Japan, the Netherlands, Singapore and Taiwan and other countries and regions, and are known as "a successful example of China's large-scale instrument exports to developed countries and regions." . It also equipped a scanning electroacoustic microscope for Baosteel, one of the top universities, research institutes and one of the world's top 500 companies.
Scanning electroacoustic imaging technology has promoted the development of related microscopic imaging technology in China. Based on electroacoustic imaging technology, it is combined with the currently used atomic force microscope to establish low-frequency (<30kHz) high-resolution (~10nm) scanning probe acoustic microscopy imaging technology, which is The different technical features, functions and imaging mechanisms of probe microscopes based on tunnel microscopy (STM) and atomic force microscopy (AFM) are new developments in scanning electroacoustic microscopy, and their application prospects are very broad.
China's large-scale scientific instruments have always relied on imports. The electro-acoustic microscope independently developed by China has been exported to foreign countries and won honors for the country. Scanning electroacoustic microscopy developed independently in China and the scanning probe acoustic microscopy developed on the basis of this have enriched and developed microscopic imaging science and technology, providing for the study of material mesoscopic and microscopic features. A new means and promoted the development of related science and technology.
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