One-dimensional chromium atom deposition nano-grating sample plate

After three years of scientific and technological research, a research team composed of the China Academy of Metrology, Tongji University and National University of Defense Technology has successfully developed a one-dimensional chromium atom-deposited nanometer grating model for the first time in China. This topic was recently approved by the AQSIQ Science and Technology Division. Its successful development has broken through the technical bottleneck of the development of China's nanotechnology industry, and its technical indicators have reached the international advanced level.

It is understood that with the rapid development of nano-technology, the demand for metrology-based standards in the nano-industry has also become increasingly prominent. However, due to the lack of core technologies, nearly 10,000 nanometer measuring instruments imported annually in China cannot be tested for quality and have to rely on foreign models for calibration. Even so, the uneven levels of China's nano-industry have not been fundamentally resolved. It is understood that due to the different traceability channels, the linewidth of the two large integrated circuit companies in Wuxi actually differs by 10%. The question of traceability has seriously hampered the development of China's nanotechnology industry and caused great losses to the national economy.

In order to break this predicament, the research team led by the Quantum Benchmark Lab of the Institute of Quantum Science at the Chinese Academy of Metrology Sciences, based on investigations, initiated the "Eleventh Five-Year" National Science and Technology Support Program project in 2006 - "Cold "Atomic and nanoscale metrology benchmarks for key technologies." After three years of hard work, the research team mastered the theory and technology of chromium atom deposition nano-grating, established a high-vacuum atom deposition experimental device, and developed a one-dimensional nano-scale grating standard template with a pitch of (213.1±0.5) nm. And passed the measurement verification of professional organizations.

According to reports, the one-dimensional standard nano-grating model is one of the five nano-standard models prescribed by the International Bureau of Weights and Measures. The achievement of this achievement has made China one of the few countries to master the technique of deposition of atomic gratings, making it possible to localize nanometric standard materials, and will fundamentally solve the problems of traceability and calibration of nanometer measuring instruments in China and change them. The long-term dependence of nanometering on the status quo in foreign countries provides strong technical support for the rapid development of China's nanotechnology industry.